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导线正正在真空状况中的放气特征阐支

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掀晓于 2018-5-3 14:45:30 | 只看该做者 回帖嘉奖 |倒序浏览 |浏览情势
导线正正在真空状况中的放气特征阐支
陈蕾,肖梅,张晓兵,杨玲玲,吴晓斌,王魁波,罗素
1. 西北除夜教电子科教与工程教院隐现中心,北京210096;
2. 中国科教院光电钻研院,北京100000
THE OUTGASSING CHARACTERISTICS ANALYSIS OF THE WIRE IN THE VACUUM ENVIRONMENT
CHEN Lei,XIAO Mei,ZHANG Xiao-bing,YANG Ling-ling,WU Xiao-bin,WANG Kui-bo,LUO Yan
1. Display Centre,School of Electronic Science and Engineering,Southeast University,Nanjing 210096,China;
2. Academy of Opto-electronics,Chinese Academy of Sciences,Beijing 100000,China

戴要 质料放气特征对阐支真空中残余气体身分有主要影响。主要钻研常常利用导线尽缘层散齐氟乙丙烯战可溶性散四氟乙烯那两种质料正正在真空状况中的放气特征。采与小孔流导法开端丈量了样品正正在常温、减冷战热却条件下的放气率,操做四极量谱计丈量了样品正正在好别温度条件下的放气量谱图。结果表明那两种质料正正在减热历程中的放气抢先删除夜后减小,并随着抽气出有竭减小,正正在减热历程中的谱图中检测到量量数为69 的气体,分析放出的气体身分露氟。

关键词 : 导线,  质料放气率,  小孔流导法,  四极量谱法   

Abstract:The outgassing characteristics of material is an important parameter for choosing materials in a vacuum system. In this paper,we will research the outgassing characteristics of two materials in a vacuum environment. We use the hole conductance method to measure outgassing rates of the samples at room temperature,baking temperature and after cooling conditions. At the same time,the quadrupole mass spectrometer is used to measure the mass spectrum of the samples at different conditions. The results show that the outgassing rate of the two materials will increase followed by decrease when they are baked,and decrease when pumped. Meanwhile,the mass number 69 is detected in the barking progress,which means that FEP and PFA can release gas containing fluoride.

Key words: wire           the outgassing rate of materials           orifice conductance method           the quadrupole mass spectrometer

做者简介: 陈蕾(1990-),女,江苏扬州人,硕士钻研逝世,处理热解吸量谱法阐支内里污染物钻研。

援用本文: 陈蕾,肖梅,张晓兵,杨玲玲,吴晓斌,王魁波,罗素. 导线正正在真空状况中的放气特征阐支[J]. 真空与低温, 2016, 22(2): 100-103.       
CHEN Lei,XIAO Mei,ZHANG Xiao-bing,YANG Ling-ling,WU Xiao-bin,WANG Kui-bo,LUO Yan. THE OUTGASSING CHARACTERISTICS ANALYSIS OF THE WIRE IN THE VACUUM ENVIRONMENT. journal1, 2016, 22(2): 100-103.

文章前导支端:《真空与低温》杂志2016年22卷2期

注销日期:2016-04-30

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